Scaling laws in micro & nanosystems
Summary
This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.
Content
The following topics are introduced and analytical modeling and scaling laws are discussed.
- Introduction to scaling laws: Scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown
-Thermal effects: conduction, convection, dynamics, breakdown, thermal micro-actuators.
- Mechanical scaling: Mass-spring model, mechanical noise, squeeze film effects. Lumped element
- Electrical scaling: electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetic beads.
- Microfluidics & Nanofluidics: Liquid flow, gas flow, mixing, surface tension, chromatography.
- Electrokinetics: Dielectriphoresis and electrophresis, EHD and MHD pumps, electrowetting.
Keywords
Micro-Electro-Mechanical Systems (MEMS)
Nano-Electro-Mechanical Systems (NEMS)
Scaling
Lumped Element Model (LEM)
Electrostatics
Electromagnetic
Microfluidic
Learning Prerequisites
Important concepts to start the course
Students MUST have strong background in microfabrication: we assume students undestand how MEMS are fabricated
solid grasp of electromagnetics, electrostatics, fluid dynamics
knowledge of analysis of electrical circuits
Learning Outcomes
By the end of the course, the student must be able to:
- Analyze MEMS / NEMS design
- Predict performance of MEMS
- Exploit scaling laws in MEMS
- Compare different MEMS principles and designs
- Choose appropriate designs
- Estimate performance of MEMS
Transversal skills
- Plan and carry out activities in a way which makes optimal use of available time and other resources.
- Respect the rules of the institution in which you are working.
- Demonstrate the capacity for critical thinking
- Use a work methodology appropriate to the task.
Assessment methods
oral exam
In the programs
- Semester: Fall
- Exam form: Oral (winter session)
- Subject examined: Scaling laws in micro & nanosystems
- Lecture: 2 Hour(s) per week x 14 weeks
- Semester: Fall
- Exam form: Oral (winter session)
- Subject examined: Scaling laws in micro & nanosystems
- Lecture: 2 Hour(s) per week x 14 weeks
- Semester: Fall
- Exam form: Oral (winter session)
- Subject examined: Scaling laws in micro & nanosystems
- Lecture: 2 Hour(s) per week x 14 weeks
- Semester: Fall
- Exam form: Oral (winter session)
- Subject examined: Scaling laws in micro & nanosystems
- Lecture: 2 Hour(s) per week x 14 weeks