MICRO-470 / 2 credits

Teacher: Shea Herbert

Language: English


Summary

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

Content

Keywords

Micro-Electro-Mechanical Systems (MEMS)

Nano-Electro-Mechanical Systems (NEMS)

Scaling

Lumped Element Model (LEM)

Electrostatics

Electromagnetic

Microfluidic

Learning Prerequisites

Important concepts to start the course

Students MUST have strong background in microfabrication: we assume students undestand how MEMS are fabricated

solid grasp of electromagnetics, electrostatics, fluid dynamics
knowledge of analysis of electrical circuits

 

Learning Outcomes

By the end of the course, the student must be able to:

  • Analyze MEMS / NEMS design
  • Predict performance of MEMS
  • Exploit scaling laws in MEMS
  • Compare different MEMS principles and designs
  • Choose appropriate designs
  • Estimate performance of MEMS

Transversal skills

  • Plan and carry out activities in a way which makes optimal use of available time and other resources.
  • Respect the rules of the institution in which you are working.
  • Demonstrate the capacity for critical thinking
  • Use a work methodology appropriate to the task.

Assessment methods

oral exam

Resources

Moodle Link

In the programs

  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Lecture: 2 Hour(s) per week x 14 weeks
  • Semester: Fall
  • Exam form: Oral (winter session)
  • Subject examined: Scaling laws in micro & nanosystems
  • Lecture: 2 Hour(s) per week x 14 weeks

Reference week

 MoTuWeThFr
8-9     
9-10     
10-11     
11-12     
12-13     
13-14     
14-15     
15-16     
16-17     
17-18     
18-19     
19-20     
20-21     
21-22     

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