MICRO-606 / 1 credit

Teacher: Shea Herbert

Language: English

Remark: Next time: in Summer 2025


Frequency

Every 2 years

Summary

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.

Content

  • Introduction to scaling laws: scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown.
  • Thermal effects: conduction, convection, dynamics, breakdown, thermal micro-actuators, microreactors.
  • Mechanical devices: mass-spring model, mechanical noise, squeeze film effects.
  • Electrical devices: electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetostriction, magnetic beads.
  • Microfluidics: liquid flow, gas flow, diffusion-mixing, surface tension, entropy trapping.
  • Electrokinetics: dielectrophresis, EHD and MHD pumps, electrowetting, electroosmosis, capillary electrophoresis.

 

Keywords

Scaling laws, thermal micro-actuators, electromagnetic micro-actuators, microfluidics, electrokinetics

Learning Prerequisites

Recommended courses

  • and/or microsystems and MEMS technologies
  • Basics of physics

Learning Outcomes

By the end of the course, the student must be able to:

Transversal skills

  • Plan and carry out activities in a way which makes optimal use of available time and other resources.
  • Use a work methodology appropriate to the task.
  • Communicate effectively with professionals from other disciplines.
  • Give feedback (critique) in an appropriate fashion.
  • Demonstrate the capacity for critical thinking
  • Access and evaluate appropriate sources of information.
  • Make an oral presentation.

Assessment methods

in-class presentation

In the programs

  • Number of places: 13
  • Exam form: Oral presentation (session free)
  • Subject examined: Scaling in MEMS
  • Lecture: 14 Hour(s)
  • Type: optional
  • Number of places: 13
  • Exam form: Oral presentation (session free)
  • Subject examined: Scaling in MEMS
  • Lecture: 14 Hour(s)
  • Type: optional

Reference week

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