MICRO-605 / 1 credit

Teacher: Ataman Caglar

Language: English

Remark: November 14th to 17th, 2023 (Microcity, Neuchatel)


Every 2 years


Micro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive insight into this field, covering topics from fundamentals to applications.


Learning Prerequisites

Recommended courses

Basic knowledge of physics and mathematics
MICRO-621: Micro and Nanofabrication (MEMS)
MICRO-606: Scaling in MEMS




Micro-Optics: Elements, Systems and Applications, edited by Hans Peter Herzig
Fundamentals of Micro-Optics, by Hans Zappe
Optical MEMS, Nanophotonics, and Their Applications, edited by Guangya Zhou & Chengkuo Lee
MOEMS: Micro-Opto-Electro-Mechanical Systems, by Manouchehr E. Motamedi
Microsystem Design, by Stephen Senturia
Fundamentals of Microfabrication, by Marc Madou
Micro Electro Mechanical System Design, by J. Allen
Analysis and Design Principles of MEMS Devices, by Minhang Bao

Références suggérées par la bibliothèque

Moodle Link

In the programs

  • Number of places: 20
  • Exam form: Written (session free)
  • Subject examined: Optical MEMS and micro-optics
  • Lecture: 14 Hour(s)
  • Number of places: 20
  • Subject examined: Optical MEMS and micro-optics
  • Lecture: 14 Hour(s)

Reference week

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